专利名称：Metalorganic chemical vapor deposition
(MOCVD) process and apparatus to produce平凡之路吉他谱
multi-layer high-temperature监控安装视频教程
superconducting (HTS) coated tape
发明人：Venkat Selvamanickam,Hee-Gyoun Lee
申请号：US10602468全球最贵的手机
申请日：20030623
干部作风建设心得体会
公开号：US20040255855A1
家常凉菜的做法公开日：
太多英语
20041223
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摘要：An MOCVD apparatus and process for producing multi-layer HTS-coated tapes
with incread current capacity which includes multiple liquid precursor sources, each having an associated pump and vaporizer, the outlets of which feed a multiple compartment showerhead apparatus within an MOCVD reactor. The multiple compartment showerhead apparatus is located in clo proximity to an associated substrate heater which together define multiple deposition ctors in a deposition zone.
申请人：SELVAMANICKAM VENKAT,LEE HEE-GYOUN
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