专利名称：HEATING APPARATUS
发明人：KOMINO, Mitsuaki,SAITO, Kenji
申请号：EP07743342.3
申请日：20070514
公开号：EP2034048A1
公开日：
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尽力读音20090311
专利内容由知识产权出版社提供
专利附图：
摘要：The prent invention is to provide a heating apparatus available to reduce temperature quickly with efficient cooling effects in the ca of reducing the
temperature of a chamber or the like. A substrate processing apparatus 1 compris a heating unit 100 in a chamber inner space 23 surrounded by a processing chamber 11 and
a cover 12. The heating unit 100 is provided by a planer heating body 113 between an outer shell 111 and an inner shell 112. The heating unit generates heat when electricity is carried to the planar heat generating body 113, and heats the chamber inner space 23 to a desired temperature. At a boundary ction of the outer shell 111 and the planar shaped heating body 113 of the heating unit 100, a cooling medium flow path 114 is spirally arranged along the circumference surface of the heating unit 100. At the time of reducing temperature, the cooling medium is permitted to flow in the cooling medium flow path 114 to forcibly cool the chamber inner space 23 and the substrate processing apparatus 1, and the temperature is rapidly reduced.大雁精神
一什么春雨申请人：EAGLE INDUSTRY Co., Ltd.
聂政刺韩王女生电影地址：1-12-15, Shiba-Daimon, Minato-ku Tokyo 105-8587 JP
国籍：JP
代理机构：Feakins, Graham Allan
高兴的英文>e开头的英文名女
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