专利名称：CAPACITIVE AREA-CHANGED MEMS GYROSCOPE WITH ADJUSTABLE四人小品剧本
RESONANCE FREQUENCIES
发明人：TAMSIR, AGUS, SANTOSO,MANUT, AZRIF,SULAIMAN, SURAYA
申请号：MY2008000124
野漆树
名声狼藉申请日：20081022面条种类
公开号：WO2009057990A3
公开日：
鼎湖山听泉20090806
专利内容由知识产权出版社提供饮食养生汇
摘要：There is disclod a surface micromachined (MEMS) gyroscope device where the resonance frequencies are capable of being adjusted and tuned for obtaining maximum respon gain for higher nsitivity. The MEMS gyroscope compris of a substrate (1), a proof-mass (2), a capacitive area-changed plate (3), a driving mode electrode (4) and a nsing mode electrode (5). The proof -mass (2) is structured as a cross-shaped body that includes the nsing mode and driving mode electrodes (4, 5) where the proof -mass is adapted to oscillate back and forth laterally over the capacitive area-changed plate (3) defining an area-changed capacitive type MEMS gyroscope. The driving and nsing mode electrodes (4,5) are shaped as a symmetrical branch-finger structure. The proofmass is connected to the substrate (1) through a spring (6) and the branch-finger structure is provided having two different gap side-by-side and narrow-wide narrow gap ries configuration, whereby, the spring is configured as a circular-shaped, rectangular-shaped or variations of the same. The spring constant {KX, Ky) is controllable and adjustable through the application of voltage on the branch finger acting as actuator and pudo
红烧大肠spring thus providing tuned resonant frequency for higher nsitivity.
申请人：MIMOS BERHAD,TAMSIR, AGUS, SANTOSO,MANUT, AZRIF,SULAIMAN, SURAYA
辛亥革命的影响
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