Dislocation stress memorization technique (DSMT) o

更新时间:2023-06-19 09:27:50 阅读: 评论:0

专利名称:Dislocation stress memorization technique
(DSMT) on epitaxial channel devices
发明人:Tsung-Hsing Yu,Shih-Syuan Huang,Yi-Ming
Sheu,Ken-Ichi Goto
申请号:US15345814
申请日:20161108
公开号:US09899517B2
公开日:
20180220
专利内容由知识产权出版社提供
专利附图:
入党感言摘要:The prent disclosure relates to a transistor device having epitaxial source and drain regions with dislocation stress memorization (DSM) regions that provide stress to a神奇的大自然作文>国产口红>炖羊排骨的家常做法
channel region. In some embodiments, the transistor device has an epitaxial source region arranged within a substrate. An epitaxial drain region is arranged within the substrate and is parated from the epitaxial source region by a channel region. A first DSM region, which has a stresd lattice configured to generate stress within the channel region, extends from below the epitaxial source region to a location within the epitaxial source region. A cond DSM region, which has a stresd lattice configured to generate stress within the channel region, extends from below the epitaxial drain region to a location within the epitaxial drain region.
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市场分析怎么做申请人:Taiwan Semiconductor Manufacturing Co., Ltd.
地址:Hsin-Chu TW
国籍:TW健康是1后面是0的名言
代理机构:Eschweiler & Potashnik, LLC
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