Semiconductor substrate reimburment system

更新时间:2023-06-18 06:33:01 阅读: 评论:0

专利名称:Semiconductor substrate reimburment system
红酒有保质期吗发明人:野中 浩
不完美的人生申请号:JP特願昭60-255543
申请日:19851114
公开号:JP特公平6-101514B2
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公开日:
19941212
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摘要:PURPOSE:To make rolling dies pitch adjusting among housing grooves for a substrate housing preci, and to prevent the damage of wafers and the displacement of pitches on the pushing-up of the wafers by a wafer push-up rod by mounting a pair of wafer holding plates, to which grooves at the same pitches as the housing grooves are formed, in a displaceable manner in the direction orthogonal to the housing grooves for the housing. CONSTITUTION:When a pair of wafer holding plates 1, 1 are lowered and the holding plates 1, 1 are positioned with the upper edge of a carrier 3 by positioning plates 5, feed rods 6, 6 are handled respectively and the wafer holding plates 1 are displaced in the direction orthogonal to grooves for the carrier 1 and rolling dies pitch adjusting among the grooves is conducted when displacement is generated among the grooves of the wafer holding plates 1, 1 and the carrier 3. Wafers 2 are pushed up from the carrier 3 by a push-up rod 4, and the wafers are pasd through a pair of the wafer holding plates 1 and re- erected to another carrier. Rolling dies pitch adjusting among the grooves is performed, and the wafers are re-erected, thus preventing the damage of the wafers on the pushing-up of the wafers.
申请人:九州日本電気 株式会社
看破红尘的法号地址:熊本県熊本市八幡町100番地国籍:JP
代理人:京本 直樹
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