超微阳极扫描式电沉积加工的
厚度均匀性实验研究
侯亚楠袁明平美袁张峻中袁张新民袁曹军
歃血为盟的意思渊河南理工大学特种加工技术与装备研究所袁河南焦作454000冤
摘要院为解决多尺度共存掩膜电沉积件的厚度不均问题袁提出了直线状超微阳极扫描式电沉积加工技术袁研究分析了共基底批量电沉积微构件和宏-微组合构件时的厚度均匀性及其影响因素袁并与传统电沉积技术进行对比遥结果表明院厚度均匀性受工作间隙和电沉积特征区结构尺寸影响较大袁工作间隙越小尧结构尺寸越小袁电铸件的厚度均匀性越好袁而几乎不受移动速度和极间电压的影响遥相比常规掩膜电沉积技术袁超微阳极扫描式掩膜电沉积可获得厚度均匀性更佳的电沉积制件遥
关键词院扫描式电沉积曰超微阳极曰尺度效应曰厚度均匀性
中图分类号院TG662文献标志码院A 文章编号院1009原279X渊2020冤04原0047-06Experimental Study on Thickness Uniformity of the Deposit Obtained by Ultra-fine Anode Scanning Electrodeposition HOU Ya忆nan袁MING Pingmei袁ZHANG Junzhong袁ZHANG Xinmin袁CAO Jun 渊Institute of Non-traditional Machining and Equipment袁He忆nan Polytechnic University袁Jiaozuo 454000袁China 冤Ab甘甜的近义词
stract 院In order to enhance the thickness uniformity of electrodeposited parts from patterned multi -scale photoresist masks袁a linear ultra -fine anode scanning electrodeposition machining technology was propod.In the process袁the thickness uniformity and its influencing factors of the deposits with the same order scale or multiple -scale produced on the same substrate were studied through experiment袁and the results were compared with the traditional electrodeposition technology.The results show that the thickness uniformity is greatly affected by the working gap and the structure size of the electrodeposition feature area.The smaller the working gap or the structure size袁the better thickness uniformity of the foundry袁and it is hardly affected by the moving speed or voltage between electrodes.Compared with conventional through-mask electrodeposition process袁the propod process can obtain electrodeposition products with better thickness uniformity.Key words 院scanning electrodeposition曰ultra-fine anode曰scale effect曰thickness uniformity 收稿日期院2020-06-11广式炒面
神话故事嫦娥奔月基金项目院国家自然科学基金资助项目渊51875178冤曰河南省高等学
校重点科研项目计划渊19A460022冤
松鼠的英语
第一作者简介院侯亚楠袁女袁1995年生袁硕士研究生遥
莜面蒸饺
通信作者简介院明平美袁男袁1974年生袁教授遥电沉积是一种基于阳离子阴极还原堆叠原理
的成形尧成材和成膜技术袁具有成形精度高尧工艺温
度低尧结构-性能-形貌易协同调控尧适用材料与几
何特征受限小等特点袁在航空航天尧国防武器尧表面
工程尧精密机械尧等领域应用广泛袁常以电镀尧电刷太阳作文
镀尧电铸等形式在工业生产中发挥重要作用[1-4]遥电沉积层/件的形貌特征与色泽尧硬度尧光亮度尧耐蚀性尧导电导热性尧厚度均匀性等性能关注点会因应用场合不同而各有侧重袁但厚度均匀性却受到共同关注袁这是由于厚度不均会影响电沉层/件外观和性能袁且极难消除遥然而袁厚度均匀性的影响因素众多且大都相互关联袁难以协同取优袁当制件形状复杂尧宏-介-微多尺度混存时袁难度更大遥对此袁相关学者从不同角度持续地开展研究遥
电化学加工叶电加工与模具曳2020年第4期
蓦然怎么读47要要
