专利名称：TOROIDAL LOW-FIELD REACTIVE GAS AND PLASMA SOURCE HAVING A DIELECTRIC
VACUUM VESSEL崔雅涵微博
发明人：HOLBER, William, M.,CHEN, Xing,COWE,
Andrew, B.,BESEN, Matthew, M.,COLLINS, Jr,
征信中心个人信用查询Ronald, W.,TRULLI, Susan, C.,SHAO, Shouqian 申请号：US2004011183
申请日：20040412
公开号：WO04/095499P1
公开日：
20041104
专利内容由知识产权出版社提供
摘要：Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus (300) includes a vesl (310) and at least one ignition electrode (330) adjacent to the vesl. A total length of a dimension (D) of the at least one ignition electrode is greater than 10% of a length of the vesl's channel. The apparatus can include a dielectric toroidal vesl, a heat sink having multiple gments urged toward the vesl by a spring-loaded mechanism, and a thermal interface between the vesl and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vesl channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
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两个字的网名申请人：HOLBER, William, M.,CHEN, Xing,COWE, Andrew, B.,BESEN, Matthew,
M.,COLLINS, Jr, Ronald, W.,TRULLI, Susan, C.,SHAO, Shouqian
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国籍：US,US,US,US,US,US,US,US云程发轫
代理机构：CAPRARO, Jr. Joph, A.
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