专利名称:PROCESS FOR PRODUCING RF POWDER 发明人:FURUMURA, Yuji,MURA, Naomi,NISHIHARA, Shinji,FUJINO, Katsuhiro,MISHIMA,
动漫女生怎么画释言Katsuhiko,KAMIHASHI, Susumu
申请号:JP2007072746
申请日:20071126
公开号:WO08/065988P1夸家乡
公开日:
20080605百雀羚广告
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运动会简笔画摘要:This invention provides a process for producing an RF powder having such a property that is usable as an RF powder (powdery material) comprising a large amount of particles and in a collective form, wherein a large number of RF powder particles can be reliably parated and taken out at a high yield from a wafer. The production process is a process for producing an RF powder comprising a large amount of particles, each particle (11a) comprising a substrate (12) and a magnetic field coupled circuit element (15). The production process compris a step of producing a large amount of antenna circuit elements (39) on a wafer (40) (S11), a gas dicing step of forming a cutout groove at a position for parating the magnetic field coupled circuit element from the wafer (S13), a protective film forming step of covering the periphery of the magnetic field coupled circuit element with a protective film (S14), a reinforcing step of applying a reinforcing plate with the aid of a pressure-nsitive adhesive sheet (S15), a grinding step of grinding the backside of the wafer to the cutout groove (S16), and a parating step of removing the reinforcing plate to parate circuit elements (S17).
申请人:FURUMURA, Yuji,MURA, Naomi,NISHIHARA, Shinji,FUJINO, Katsuhiro,MISHIMA,
Katsuhiko,KAMIHASHI, Susumu 地址:JP,JP,JP,JP,JP,JP,JP
国籍:JP,JP,JP,JP,JP,JP,JP
代理机构:INABA, Yoshiyuki
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