专利名称：METHOD FOR PRODUCING AND TESTING A CORROSION-RESISTANT CHANNEL IN A
SILICON DEVICE
发明人：HARRIS, James, M.,PATEL, Sapna
申请号：EP03786769.4
申请日：20031117
公开号：EP1565932A2
公开日：
黑盒测试的优点
写论文的研究方法
20050824
闺蜜说
专利内容由知识产权出版社提供
摘要：A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be ud with corrosive compounds, such as fluorine.
碗糕的做法A wetted path of a MEMS device is coated (210) with either an organic compound resistant to attack by atomic fluorine or a material capable of being passivated by atomic fluorine. The device is then expod to a gas that decompos into active fluorine compounds (220) when activated by a plasma discharge. One example of such a gas is CF4, an inert gas that is easier and safer to work with than volatile gas like CIF3. The gas will passivate the material (if applicable) and corrode any expod silicon. The device is tested (230) in such a manner that any unacceptable corrosion of the wetted path will cau the device to fail. If the device operates properly, the wetted path is deemed to be resistant to corrosion by fluorine or other corrosive compounds, as applicable.
申请人：Redwood Microsystems, Inc.
地址：959 Hamilton Avenue Menlo Park, CA 94025 US商业管理公司>老鼠咬伤
鸳尾花>产后盆腔积液
国籍：US
代理机构：Liegang, Eva 更多信息请下载全文后查看
