放的偏旁专利名称：Semiconductor processing apparatus with
integrated weighing device
发明人：Albert Hasper
申请号：US10233895
特别的人方大同
申请日：20020829
公开号：US20040040659A1
朱静怡公开日：
史记孟尝君列传
20040304
专利内容由知识产权出版社提供
专利附图：
在农村摘要：An apparatus for processing substrates compris a substrate handling轻浮的反义词
chamber, including a substrate handling robot for transferring substrates from casttes into a substrate carrier. A processing chamber is provided adjacent to the handling
chamber, including one or more furnaces adapted to process a plurality of the substrates supported in the carrier. A weighing device is accessible to the substrate handler. The weighing device is adapted to weigh the substrates before and after processing the substrates in the processing chamber. The illustrated process is a curing anneal for a low k polymer previously deposited on the substrates.
申请人：HASPER ALBERT
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