Rotation head for Czochralskicrystal pulling appar

更新时间:2023-05-22 01:39:49 阅读: 评论:0

专利名称:Rotation head for Czochralskicrystal pulling
冬季
apparatus
表格转文本发明人:SCHULMANN, WINFRIED,THIMM,
而的用法FRANZ,KAISER, HELMUT, DR.
申请号:EP98104746.7
申请日:19980317
公开号:EP0867535A2
公开日:
19980930
专利内容由知识产权出版社提供
专利附图:考研分值
摘要:A rotary head (11), for a Czochralski crystal drawing unit, has a reference
精确到百分位platform (16) which can turn about a vertical axis (A) and which has, in the region of this
axis, a vertical passageway (25) for a windable pulling element (13). A drive unit (23) is mounted on the platform for driving a horizontal shaft (22), on which is entrained an axially displaceable winding drum (15) with a helical winding groove (29) for the pulling element (13). A guide guides axial displacement of the drum such that the pulling element is guided along the turning axis (A). The novelty is that a helical guide element (30), which has the same pitch as the winding groove (29) and which rotates with the horizontal shaft (22), is provided on the shaft (22) at a point offt from the vertical turning axis (A) and cooperates with a guide nut (31) such that the pulling element portion, extending tangentially from the winding drum, is guided along the vertical axis (A).
君若申请人:BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG
地址:Wilhelm-Rohn-Stras 25 63450 Hanau DE
国籍:DE
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