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XPS
Quantitative chemical state information from surfaces and
thin films
学习英语作文Spectra contain binding energy information XPS is applicable to a broad range of materials systems
Detect light elements that are difficult to e with SEM/EDX Detection of all elements above Helium Detect ultra thin surface layers, surface contamination, process residues, and surface gregation of materials
洗衣机英语
Surface nsitivity
Benefit
Feature
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Electron Spectroscopy for Chemical Analysis
also known as X-ray Photoelectron Spectroscopy (XPS)
XPS is an analytical technique that provides compositional information from the top few atom layers of a sample by probing it with a mono-energetic X-ray beam Detect:
all elements above He Detection limits:0.5 -0.01 atomic %Analysis depth: 5-75 Å(0.5~7.5nm)Spatial resolution:
<10µm probe size
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Surface Sensitivity
X-rays penetrate deep into the sample surface, exciting photoelectrons. However, photoelectrons can travel only a short distance before their energy is modified due to interaction with neighboring atoms. Only photoelectrons that escape at their original energy contribute to a peak in a spectrum. This phenomena makes XPS a very surface nsitive technique, with an average depth of analysis of 50Å.
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Schematic Monochromatic XPS System
Quartz Crystal
Multi-channel L e n s
Al k αx-rays
最高分辨率X-ray Source
Hemispherical mirror analyzer
读后感格式范文Energy Analyzer
15 kv electrons
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