Manufacturing an on-chip microlens array

更新时间:2023-05-15 04:34:31 阅读: 评论:0

肉段的做法专利名称:Manufacturing an on-chip microlens array
发明人:Xinqiao Liu,Yijing Fu
申请号:US16030206
申请日:20180709
公开号:US10714520B1
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公开日:
20200714
专利内容由知识产权出版社提供施于人
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专利附图:
摘要:A method for monolithically fabricating a light field nsor with an array of
microlens. Each microlens is formed directly on a surface including a plurality of pixels of the light field nsor formed on a wafer. The manufacturing system performs a
preparation of the surface including the plurality of pixels formed on the wafer. The
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manufacturing system deposits a layer of photoresist on the surface of the wafer. The manufacturing system performs a patterning on the deposited layer to form one or more blocks of cured photoresists. The manufacturing system performs a thermal curing of the one or more blocks of uncured photoresists to form an array of microlens of the light field nsor. Each microlens covers at least one of the plurality of pixels of the light field nsor formed on the wafer.
申请人:Facebook Technologies, LLC
地址:Menlo Park CA US
国籍:US
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代理机构:Fenwick & West LLP
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