Plastic Silicon Pressure Sensors DESCRIPTION
The SX7 Series nsors offer a high pressure nsor in a very small “button” style package.运动的好处和重要性
The special devices u an RTV 730 for die attach to allow measurement of gauge pressures of 1 psi (SX7001D) to 300 psi (SX7300D) with pressure applied to the backside of the nsor chip (Port P2) only. The output voltage is proportional to pressure. The output of the bridge is ratiometric to the supply voltage and operation from any dc supply voltage up to +12V is acceptable.
This ries is intended for u with non-corrosive, non-ionic working fluids such as air, dry gas, and the like.
FEATURES •Button package •High pressure •Small size
•Low noi
•RTV 730 Die Attach
POTENTIAL APPLICATIONS •Medical equipment •Computer peripherals •Pneumatic controls •HVAC
SX7 Series Plastic Silicon Pressure Sensors
2 /nsing
Table 1. Maximum Ratings for All Devices
Characteristic Parameter Unit Supply voltage, VS +12 Vdc Maximum pressure on any port 200 psig Temperature ranges: Operating Storage -40 to 85 -55 to 125 °C [°F] Humidity limits 0% to 100% RH Lead temperature 250 °C [°F] Soldering duration 3 s
Table 2. Standard Pressure Ranges Full Scale Span*
Catalog Listing Operating Pressure Proof
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Pressure
Maximum Pressure Min. Typ. Max. SX7001D 1 psi – 20 psid 15 mV 20 mV 25 mV SX7005D 5 psi – 20 psid 50 mV 75 mV 100 mV SX7015D 15 psi – 30 psid 75 mV 110 mV 150 mV SX7030D 30 psi – 60 psid 75 mV 110 mV 150 mV SX7100D 100 psi – 150 psid 100 mV 150 mV 200 mV SX7150D 150 psi – 200 psid 75 mV 110 mV 150 mV SX7300D 0 psi to 300 psi
350 psi 300 psid 100 mV 150 mV 200 mV
*Full-Scale Span is the algebraic difference between the output voltage at full-scale pressure and the output at zero pressure. Full-Scale Span is ratiometric to the supply voltage.
Table 3. Performance Characteristics SX7001D
Characteristic Min. Typ. Max. Unit Note Sensitivity 3.0 4.0 5.0 mV/V/psi – Temperature coefficient of span -2550 -2300 -2050 ppm/°C 4 Zero pressure offt -35 -20 0 mV – Temperature coefficient of offt – +4 – μV/V/°C 4 Combined pressure non-linearity and pressure hysteresis – 0.2 ±0.5 %FS 3 Long-term stability of offt and nsitivity – 0.1 – %FS 9 Respon time (10% to 90%) – 100 – μs 8 Input resistance – 4.1 – kOhm 6 Temperature coefficient of resistance +690 +750 +810 ppm/°C – Output resistance – 4.1 – kOhm 7 Repeatability – 0.5 – %FS 5 SX7005D
Characteristic Min. Typ. Max. Unit Note Sensitivity 2.0 3.0 4.0 mV/V/psi – Temperature coefficient of span -2550 -2300 -2050 ppm/°C 4 Zero pressure offt -35 -20 0 mV – Temperature coefficient of offt – +4 – μV/V/°C 4 Combined pressure Non-linearity and pressure hysteresis – 0.2 ±0.5 %FS 3 Long-term stability of offt and nsitivity – 0.1 – %FS 9 Respon time (10% to 90%) – 100 – μs 8 Input resistance – 4.1 – kOhm 6 Temperature coefficient of resistance +690 +750 +810 ppm/°C – Output resistance – 4.1 – kOhm 7 Repeatability – 0.5 – %FS 5 SX7015D
Characteristic Min. Typ. Max. Unit Note Sensitivity 1.0 1.5 2.0 mV/V/psi – Temperature coefficient of span -2400 -2150 -1900 ppm/°C 4 Zero pressure offt -35 -20 0 mV – Temperature coefficient of offt – +4 – μV/V/°C 4 Combined pressure Non-linearity and pressure hysteresis – 0.2 ±0.5 %FS 3 Long-term stability of offt and nsitivity – 0.1 – %FS 9 Respon time (10% to 90%) – 100 – μs 8 Input resistance – 4.1 – kOhm 6 Temperature coefficient of resistance +690 +750 +810 ppm/°C – Output resistance – 4.1 – kOhm 7 Repeatability – 0.5 – %FS 5
1 psi to 300 psi, Button Package
Honeywell Sensing and Control 3
Table 3. Performance Characteristics (continued) SX7030D
Characteristic Min. Typ. Max. Unit Note Sensitivity 0.5 0.75 1.0 mV/V/psi – Temperature coefficient of span -2400 -2150 -1900 ppm/°C 4 Zero pressure offt -35 -20 0 mV – Temperature coefficient of offt – +4 – μV/V/°C 4 Combined pressure Non-linearity and pressure hysteresis – 0.2 ±0.5 %FS 3 Long-term stability of offt and nsitivity – 0.1 – %FS 9 Respon time (10% to 90%) – 100 – μs 8 Input resistance – 4.1 – kOhm 6 Temperature coefficient of resistance +690 +750 +810 ppm/°C – Output resistance – 4.1 – kOhm 7 Repeatability – 0.5 – %FS 5 SX7100D
Characteristic Min. Typ. Max. Unit Note Sensitivity 0.2 0.3 0.4 mV/V/psi – Temperature coefficient of span -2400 -2150 -1900 ppm/°C 4 Zero pressure offt -35 -20 0 mV – Temperature coefficient of offt – +4 – μV/V/°C 4 Combined pressure Non-linearity and pressure hysteresis – 0.2 ±0.5 %FS 3 Long-term stability of offt and nsitivity – 0.1 – %FS 9 Respon time (10% to 90%) – 100 – μs 8 Input resistance – 4.1 – kOhm 6 Temperature coefficient of resistance +690 +750 +810 ppm/°C – Output resistance – 4.1 – kOhm 7 Repeatability – 0.5 – %FS 5 SX7150D
Characteristic Min. Typ. Max. Unit Note Sensitivity 0.1 0.15 0.2 mV/V/psi – Temperature coefficient of span -2400 -2150 -1900 ppm/°C 4 Zero pressure offt -35 -20 0 mV – Temperature coefficient of offt – +4 – μV/V/°C 4 Combined pressure Non-linearity and pressure hysteresis – 0.2 ±0.5 %FS 3 Long-term stability of offt and nsitivity – 0.1 – %FS 9 Respon time (10% to 90%) – 100 – μ
s 8 Input resistance – 4.1 – kOhm 6 Temperature coefficient of resistance +690 +750 +810 ppm/°C – Output resistance – 4.1 – kOhm 7 Repeatability – 0.5 – %FS 5 SX7300D
进入路由器Characteristic Min. Typ. Max. Unit Note Sensitivity 0.033 0.04 0.06 mV/V/psi – Temperature coefficient of span -2400 -2150 -1900 ppm/°C 4 Zero pressure offt -16 0 16 mV – Temperature coefficient of offt – +4 – μV/V/°C 4 Combined pressure Non-linearity and pressure hysteresis – 0.2 ±0.5 %FS 3 Long-term stability of offt and nsitivity – 0.1 – %FS 9 Respon time (10% to 90%) – 100 – μs 8 Input resistance – 4.1 – kOhm 6 Temperature coefficient of resistance +690 +750 +810 ppm/°C – Output resistance – 4.1 – kOhm 7 Repeatability – 0.5 – %FS 5
Notes:
1. Reference Conditions: TA = 25°C Supply VS = 5 Vdc Common Mode Line Pressure = 0 psig Pressure applied to Port 2 only.适合微信头像的图片
3: Pressure Hysteresis is the maximum output difference at any point within the operating pressure range for increasing and decreasing pressure. 4: Slope of the best straight line from 0 °C to 70 °C.
5: Maximum difference in output at any pressure with the operating pressure range and the temperature range within 0 °C to 70 °C after: a) 100 temperature cycles, 0 °C to 70 °C
b) 1.0 million pressure cycles, 0 psi to Full-Scale Span 6: Input resistance is the impedance between Vs and ground. 7: Output resistance is the impedance between + and - outputs.
8: Respon time for a 0 psi to Full-Scale Span pressure step change, 10% to 90% ri time. 9: Long-term stability over a one year period.
Figure 1. Equivalent circuit Figure 2. Pinout
Figure 3. Drawing
WARNING
PERSONAL INJURY
DO NOT USE the products as safety or emergency stop
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product could result in personal injury.
Failure to comply with the instructions could result
in death or rious injury.
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MISUSE OF DOCUMENTATION
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卷心菜炒粉条each product.
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Sensing and Control
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008180-2-EN IL50 GLO Printed in USA
April 2009
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SX7030D SX7100D
