专利名称:PELLICLE FILM
花钟板书发明人:SEKIMOTO KENICHI,SATO SHINJI,SHIBATA KATSUYA,KIYOTA TORU
申请号:JP20497790
脸上皮肤干燥怎么补水申请日:19900803
公开号:JPH0490546A
公开日:
考研三跨
梦见老家的房子
19920324
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英语颜色专利内容由知识产权出版社提供
摘要:PURPOSE:To obtain the pellicle film which does not generate electrification and does not pick up dust at the time of production of the pellicle, transportation and mask mounting by forming a copolymer of a specific alkyl acrylate monomer on the surface of a transparent thin film consisting of polyvinyl acetal. CONSTITUTION:An antireflection layer consisting of the copolymer of the fluorine-contg. alkyl (meth)acrylate monomer expresd by formula I and the hydroxyl group-contg. alkyl (meth)acrylate monomer expresd by formula II and the copd. expresd by formula III is formed on at least one surface of the transparent thin film consisting of the polyvinyl acetal. In the formulas,
一般授权
R<1> denotes H or methyl group; R<2> denotes a fluorine-contg. alkyl group and denotes the group expresd by (CH2)m(CF2)nF, where (m), (n) respectively denote an integer between 1 and 2, 3 and 14. R<3> denotes H or methyl group; R<4> denotes 2 to 4C alkyl group having an OH group at the terminal or side chain; (a), (b), (c) denote integer >=1.
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申请人:TOSOH CORP
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