专利名称：CHROME PLATE
发明人：NISHIOKA KIYUUSAKU,YAMAZAKI
TERUHIKO,UNO JIYUN,HOSHIKA
HARUYUKI,KANEDAKI YUKIMICHI,YAMADA
MITSURU
申请号：JP10447577
申请日：19770830
公开号：JPS5437579A
公开日：
19790320
专利内容由知识产权出版社提供
摘要：PURPOSE:To manufacture a high-precision mask by tting the density of O in CrOx to 0 to 0.01 or 0.1 to 2.5 at an atom-number ratio of O to Cr and by providing a thin film of no oxide to the interface between a Cr film surface and transparent substrate at need.
申请人：MITSUBISHI ELECTRIC CORP
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