专利名称：THIN FILM SENSOR ARRAY FOR THE
DETECTION OF GASES AND METHOD OF
MAKING
发明人：DiMEO, Frank, Jr.,BAUM, Thomas, H.
申请号：EP02731257.8
申请日：20020405
公开号：EP1384059A2
公开日：
20040128
专利内容由知识产权出版社提供
摘要：The prent invention provides a hydrogen nsor including a thin film nsor element formed by metal organic chemical vapor deposition (MOCVD) or physical vapor deposition (PVD), on a micro-hotplate structure. The thin film nsor element includes a film of a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered respon characteristic, such as optical transmissivity, electrical conductance, electrical resistance, electrical capacitance, magneto resistance, photoconductivity, etc., relative to the respon characteristic of the film in the abnce of hydrogen. The hydrogen-interactive metal film may be overcoated with a thin film hydrogen-permeable barrier layer to protect the hydrogen-interactive film from deleterious interaction with non-hydrogen species. The hydrogen permeable barrier may compri species to scavenge oxygen and other like species. The hydrogen nsor of the invention may be ufully employed for the detection of hydrogen in an environment susceptible to the incursion or generation of hydrogen and may be conveniently configured as a hand-held apparatus.
申请人：ADVANCED TECHNOLOGY MATERIALS, INC.
地址：7 Commerce Drive Danbury, CT 06810 US 国籍：US
代理机构：Harrison, Robert J., Ph. D.
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