注入机所有型号：
AIBT: istar
Applied Materials: 9000, 9200, 9200xR, 9500, 9500xR, Quantum, Quantum I, Quantum II, Quantum III, Quantum X, Quantum X+, Quantum xR, xR, xR/Leap, xR120, xR200, xR80
Varian Semiconductor Equipment (now Applied Materials): VIISta Trident, PLAD, VIISta HCS, VIISta HCP +/I, VIISta 80, E1000, VIISion 200, VIISion 200+, VIISion 80+, VIISta HC, 120-10, 120XP, 160XP, 180XP, 80XP, VIISta 3000, Genus, Kestrel, VIISta 810 XE/XER, VIISta 900 XPT, VIISion, E220, E500, VIISta 810, VIISta 810 XE, VIISta 900, VIISta 900XP, 300D, 300XP, 350D
Axcelis: GSD HC (200/200E/200E2), HC3, Ultra, Eterna, GSD 100, GSD 160A, GSD 200E, GSD 200E^2, GSD HC, GSD HC3, GSD III, GSD III LE, GSD LED, NV GSD, NV 10-160, NV 10-180, NV 10-80, Optima HD, ULE, Ultra, GSD HE, GSD VHE, GSD HE, GSD H
E3, GSD VHE, Optima XE, Paradigm XE, NV 3206/3204, NV 6200, NV 8200, NV 8250, Optima MD
Nissin: NH80, PR80, Exceed 3000, CLARIS, EXCEED2000A/2000AH, EXCEED2300AV, EXCEED3000AH, EXCEED9600A, NH20, NH45
SEN: NV-GSD-160A, NV-GSD-80A, NV-GSDIII, NV-GSDIII-180, SD, NV-GSDIII-90E, NV-GSDIII-LE, NV-GSDIII-LE, V-GSD-HC, LEX, LEX3, SHX, NV-GSD-HE, NV-GSD-HE3, MC3
MC3-II, NV-MC3
Ulvac: IH-860, IDZ-7000, IDZ-8001, IDZ-9001, IM-200, IW-630
