专利名称：Container table
发明人：山下 哲平，村田 正直，田中 幹，森田 日也，河野 等申请号：JP実願平4-80852
申请日：19921124
公开号：JP実用新案登録第2604109号(U2604109)Y2公开日：
20000417
专利内容由知识产权出版社提供
摘要：(57)< Abstract > < Objective > On the conveying middle of the wafer castte and while keeping, it isPollution and acid of the wafer inside the airtightness container which is and in while waitingThe container position which can prevent the growth and the like of the conversion membrane curelyIt designates that the stand is offered as purpo. < Constitution > Receiving the baplate for the electronic equipment, in order to conveyBeing the container position stand for airtightness container 1, above-mentioned airtightness koAt least, with cover component 20 of ntena opening of opening which the clod cover is doneOral end full circuit or at least particular opening end full circuit and description aboveTo receive the peripheral ction of cover component 20, from the above-mentioned airtightness container side the pushingPosssing the gasket 61 which pressure is granted featureIt does.
申请人：神鋼電機株式会社
地址：東京都江東区東陽七丁目2番14号
国籍：JP
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