专利名称：TEST STRUCTURE AND CALIBRATION
METHOD
五一放假通知发明人：Jeffrey C. Maling,Anthony K. Stamper,Eric J.
White
定州博物馆申请号：US13231516
三国全面战争攻略申请日：20110913
公开号：US20130062603A1
公开日：
20130314
狗的一生专利内容由知识产权出版社提供
专利附图：
油烟机清洁剂
摘要：A test structure for measuring a Micro-Electro-Mechanical System (MEMS)
链接工厂
安徒生童话故事丑小鸭cavity height structure and calibration method. The method includes forming a sacrificial
cavity material over a plurality of electrodes and forming an opening into the sacrificial cavity material. The method further includes forming a transparent or substantially transparent material in the opening to form a transparent or substantially transparent window. The method further includes tuning a thickness of the sacrificial cavity material bad on measurements obtained through the transparent or substantially transparent window.
申请人：Jeffrey C. Maling,Anthony K. Stamper,Eric J. White
地址：Grand Isle VT US,Williston VT US,Charlotte VT US
国籍：US,US,US
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工作通讯
