Procedure for measuring and adjusting spot size for Flow Line optimisation.
What gives good flow lines?
Injection moulding machines like a pit geometry (pit shape) that has the following: -
A. Not steep side wall angles. Less than 45 degrees in normal cas (the faster the cycle time the angles may need top be even shallower).
B. Pits that are not too deep (higher RPM on spin coater).
C. Wide pit.
_______________________________________________________________________________ Example
GOOD PIT BAD PIT
How to I get the pit shape I want for good injection moulding?
You must do a ries of basic tests first before changing the pit shape!!!!!!!!
BASIC TESTS
1. Check that photo resist is being removed well from the father by growing a cleaning mother.
2. Make sure that the cleaning station chemicals for resist removal are changed at the start of
your test. Even if the customer tells you he has already changed, CHANGE IT AGAIN!!!!!
3. Make sure that the stamper thickness is being measured on your test. The stamper MUST
be the correct thickness and have good uniformity!!!!!!!
4. Check after punching that the underside of stamper does not have a burr on the INNER and
OUTER edge. If it does, carefully remove using sanding paper.
Stamper with burr
Information side
NEXT TESTS
台湾宜兰5. Do not adjust the spot size yet! First increa the spin speed on the spin coater to reduce the
属狗最佳婚配属相
pit depth.
雷姓Has this made an improvement? Yes or No?走出梨花村
Make sure that the replicas are still within specification for I3 and I11 and for Asymmetry.
校园性故事
Push pull signal (PP and PPC should increa and I3 and I11 should decrea).
6. If clouding still prent after carrying out all the above tests now we need to change the
developing time and power. Our standard developing time for CD is 12 conds. You now need to increa your power and decrea your developing time to make slight adjustments to the width and wall angle of the pit.
7. Decrea developing time in 2 cond steps. DO NOT GO BELOW 6 SECONDS
DEVELOPING TIME!
8. Find optimum power for optimum Asymmetry at the developing times.
Has this made an improvement? Yes or No?
If none of the above has made any improvements, then we must now adjust the spot size.
HOW TO CHANGE THE SPOT SIZE
运动时间Firstly connect yourlf to the earth bonding strap.
Now u the SMB to BNC cable.
最喜欢的电影
Connect the SMB end of the cable to the focus board (PCA 1026) at the Video out connection.
Now connect the BNC end of the cable to the oscilloscope.
王立群百家讲坛
Start to master a cut and measure the current spot size position. Measure the height of the
spot profile (volts). Then measure the spot width at exactly half the height. This is called FULL WIDTH HALF MAX (FWHM). This is in milliconds (ms).
