专利名称：Plasma generation manner and its device 发明人：SAKAMI TOSHUKI，酒見 俊之
申请号：JP特願平5-34985
稍微
旅顺景点申请日：19930224
阿勒泰市公开号：JP第2916972号B2
弄臣歌剧
ppt加密>巩固的近义词公开日：
以生为本
19990705
专利内容由知识产权出版社提供
摘要：PURPOSE:To provide a method for generating a plasma in which the negative electrode surface of a plasma source is never contaminated, and the plasma in the uniformed state can be generated, and a device therefor. CONSTITUTION:A plasma generating device is provided with flow rate control mechanisms 9a, 9b as gas supply control means for independently controlling needle valves 5a, 5b for supplying different carrier gas from a pressure gradient type plasma gun 1 which is a plasma source to a vacuum vesl 10. The flow rate control mechanism 9b supplies helium carrier gas from the gas inlet port D of the pressure gradient type plasma gun 1 into the vacuum vesl 10 through the needle valve 5b as a sub-gas supplying means at discharge start to conduct glow discharge. The flow rate control mechanism 9a supplies argon carrier gas, instead of helium carrier gas, from the gas inlet port D through the needle valve 5a as a main gas supplying means when the discharge is in progress after the glow discharge shifts to arc discharge.
申请人：SUMITOMO JUKIKAI KOGYO KK，住友重機械工業株式会社
浪漫传说漫画地址：東京都品川区北品川五丁目9番11号
国籍：JP
代理人：後藤 洋介 (外1名)更多信息请下载全文后查看
