WAFFER PEDESTAL AND SUPPORT STRUCTURE THEREOF

更新时间:2023-07-23 16:32:28 阅读: 评论:0

路鸟是什么字
专利名称:WAFFER PEDESTAL AND SUPPORT
幼儿园育儿小知识STRUCTURE THEREOF
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发明人:Ren Zhou,Xuyen Pham,Shichai Fang
申请号:US16132780
申请日:20180917
后背疼怎么办公开号:US20190096736A1
公开日:
莲子百合汤
新的故事
20190328
专利内容由知识产权出版社提供
专利附图:
摘要:The invention disclos a support structure for a wafer pedestal; particularly the wafer pedestal has a wafer carrying surface defining holes for accommodation of the support structure. The support structure includes a first surface and extends
淡的反义词therebetween. The first surface includes a rising portion for supporting wafer. A center of the first surface and a center of the cond surface define an axis that is not parallel to the normal of the first surface. That is, the first surface extends oblique relatively to the cond surface such that the support structure according to the invention can be received in the pedestal in an oblique way relative to the wafer carrying surface of the pedestal.
申请人:PIOTECH CO., LTD.
地址:Shenyang CN
晚安小短句
国籍:CN
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