专利名称：AUTOMATIC FOCUSING METHOD FOR CHARGED PARTICLE BEAM ALIGNER 发明人：ASARI TOSHIHIRO
申请号：JP2018587
国庆儿童画
空印案申请日：19870130服装流行趋势
自由成熟的性
公开号：JPS63187627A
营销策划案例公开日：
19880803陈确
专利内容由知识产权出版社提供
怎么样炒虾仁>太行山上电影摘要：PURPOSE:To accurately focus irrespective of a beam current by detecting a variation in the height of a material as a variation in the deflecting width of a charged particle beam, and correcting the width and simultaneously correcting the focal point of a lens. CONSTITUTION:A deflection signal is supplied through a scan signal control unit 9 and a deflector output unit 10 to a deflector 4, and a mark is detected by the deflection of an electron beam to measure the interval. The width correction value e0 of the deflector 4 is output from a computer 6 to a deflector width correction value output unit 11 so that both coincides. A width correction unit 12 multiplies a deflection signal from the unit 10 by a correction value of (1+e0) and supplies it to the deflector 4. The region to be expod of a material 5 is moved to an exposure position. A lar length measurement by a mechanical movement and a lar length measurement by an electron beam deflection are conducted to obtain the difference e' of both, and to output it to the unit 11. The unit 12 multiplies the deflection signal by the multiplication signal of
(1+e') to correct the deflection width with respect to the variation in the height. A lar value correction unit 7 corrects the current value of a focusing lens 3.
申请人：JEOL LTD
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