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介绍新疆专利名称：CHARGED PARTICLE BEAM EQUIPMENT
AND METHOD FOR IRRADIATING CHARGED
PARTICLE BEAM
山东二本分数线
发明人：SUGIYAMA, Yasuhiko,HAGIWARA,
Ryoji,TASHIRO, Junichi
申请号：JP2006319069
配角而已
申请日：20060926
公开号：WO07/040098P1
公开日：
幼儿简笔画图片20070412
专利内容由知识产权出版社提供
摘要：Charged particle beam equipment for irradiating a charged particle beam stably with low energy while reducing the beam diameter by suppressing aberration of the charged particle beam, and its irradiation method. Charged particle beam equipment in which the quantity, energy and focusing of a charged particle beam can be regulated freely, and its irradiation method are also provided. The charged particle beam equipment (1) compris a charged particle supply ction (3) applied with an acceleration voltage E, a means (4) for deriving and accelerating a charged particle beam B, and a means (5) for focusing the charged particle beam B and irradiating an earthed sample surface S with the charged particle beam B thus focud. The accelerating means (4) and the focusing means (5) compri bipotential lens (8, 9). An exit side electrode (8c) and an incident side electrode (9a) are connected with an intermediate acceleration power supply (14) for applying a voltage having a polarity different from that of the charged particle beam B. An incident side electrode (8a) is connected with a deriving power supply (11) and an exit side electrode (9c) is earthed.
狼王铁腭
申请人：SUGIYAMA, Yasuhiko,HAGIWARA, Ryoji,TASHIRO, Junichi 地址：JP,JP,JP,JP
国籍：JP,JP,JP,JP
怎样做糖醋蒜代理机构：MATSUSHITA, Yoshiharu
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