专利名称：Edge bead removal/spin rin dry module
发明人：Stevens, Joe,Olgado, Donald,Ko, Alexander
S.,Mok, Yeuk-Fai Edwin
申请号：EP00305662.9
申请日：20000705
公开号：EP1067591A3
公开日：
键盘种类
20040324
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报价单英文
稀奇的反义词
上升天秤座
专利附图：
世界地球日手抄报内容摘要：An apparatus for etching a substrate, compris a container (102), a substrate support (104) dispod in the container; a rotation actuator (120) attached to the substrate support; and a fluid delivery asmbly (106) dispod in the container to
deliver an etchant to a peripheral portion of a substrate (122) dispod on the substrate support. Preferably, the substrate support compris a vacuum chuck (124) and the fluid delivery asmbly compris one or more nozzles (150). A method for etching a substrate is also disclod, comprising, rotating a substrate positioned on a rotatable substrate support; and delivering an etchant to a peripheral portion of the substrate. Preferably, the substrate is rotated at between about 100 rpm and about 1000 rpm, and the etchant is delivered in a direction that is substantially tangent to the peripheral portion of the substrate at an incident angle between about 0 degrees and about 45 degrees from a surface of substrate.
申请人：Applied Materials, Inc.
蓝火过山车地址：3050 Bowers Avenue Santa Clara, California 95054 US蝴蝶兰的寓意
国籍：US
代理机构：Bayliss, Geoffrey Cyril
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