专利名称：Wafer mount
发明人：井上 靖也，渡辺 玲雄，岩田 祐磨面团发酵
love过去式申请号：JP2020174775
四年级日积月累
申请日：20201016
公开号：JP2022065943A
公开日：
20220428
专利内容由知识产权出版社提供
海参菜
专利附图：
摘要： PROBLEM TO BE SOLVED: To prevent a power feeding member from coming off from a terminal at a mounting position on a plate side in a wafer mounting table. A ceramic heater 10 includes a ceramic plate 20, electrodes (first and cond heater electrodes 21 and 22), first and cond feeding members 31, 32, and first and cond
terminals on the plate side. It includes holes 23a and 24a, first and cond mounting holes 61 and 62 on the power supply side, and a direction changing member 50. The first and cond mounting holes 61 and 62 are deviated from the first and cond terminal holes 23a and 24a when viewed in a plan view. The direction changing member 50 holds the first feeding member 31 in a posture in which the direction is forcibly changed from the first mounting hole 61 to the first terminal hole 23a, and the cond feeding member 32 is held from the cond mounting hole 62 to the cond. Hold in a posture in which the direction is forcibly changed to the terminal hole 24a. [Selection diagram] Fig. 3申请人：日本碍子株式会社平民窟的百万富翁
地址：愛知県名古屋市瑞穂区須田町2番56号鸡肉土豆的做法
雨天的诗句唯美
国籍：JP
杨益言
代理人：特許業務法人アイテック国際特許事務所
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