专利名称：Microloading effect correction
发明人：Hua-Yu Liu
干花的制作方法申请号：US09945012
申请日：20010831政治答题模板
公开号：US06684382B2
槐花怎么吃公开日：
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20040127
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摘要：A method and apparatus for providing correction for microloading effects is described. Hybrid proximity correction techniques are ud to make the problem computationally more feasible. More specifically, feature edges in a layout can be
grouped into tho edges, or edge gments, with a large edge paration (group B), e.g.
greater than n, and tho having less than that paration (group A). The group B features can then be corrected for microloading effects rapidly using rules bad correction. Then both groups of edges can be corrected using model bad optical proximity correction using the output of the rule bad correction as the ideal, or reference, layout.
申请人：NUMERICAL TECHNOLOGIES, INC.
代理机构：Bever Hoffman & Harms, LLP
代理人：Jeanette S. Harms
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