专利名称：Device for controlling dispensing error in
品味母亲photo spinner equipment
发明人：Jong-Hwa Lee,Chan-Hoon Park,Ki-Hyun
Chyun
申请号：US11454843
韩翃怎么读申请日：20060619
公开号：US07594969B2
窨公开日：
20090929
专利内容由知识产权出版社提供
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专利附图：
摘要：A chemical solution dispensing device adapted for u with photo spinner
equipment is disclod. The device includes a nozzle adapted to spray chemical solution
onto a wafer, a pressure nsor associated with the nozzle and adapted to n a spraying pressure and generate a pressure value corresponding to the nd spraying pressure, and a controller adapted to receive the pressure value, compare the received pressure value to a predetermined threshold pressure value, and generate an interlock signal when the received pressure value exceeds the predetermined threshold pressure value.
申请人：Jong-Hwa Lee,Chan-Hoon Park,Ki-Hyun Chyun
地址：Hwaong-si KR,Seoul KR,Suwon-si KR好习惯养成
国籍：KR,KR,KR
小学生四年级日记代理机构：Volentine & Whitt, PLLC天马行空是什么意思
西安名吃
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