专利名称：Solar cell with flexible substrate of
雅典宪章adjustable bandgap quantum well structure
and preparation method therefor
发明人：Zhang, Tieyan,Zhang, Dong,Ju, Zhenhe,Zhao, Yan,Li, Yucai,Song, Shiwei,Wang, Jian,Bian,
Jiming,Liu, Baodan,Zheng, Hong
小米手机查找申请号：EP14162260.5
申请日：20140328
公开号：EP2889921A1
公开日：
除法分配律20150701
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专利附图：
出水才见两腿泥
羊毛被摘要：The prent invention belongs to the field of flexible solar cell manufacturing technology, in particular relates to a solar cell with a flexible substrate of an adjustable bandgap quantum well structure and a preparation method therefor. The solar cell of the prent invention has a specific structure of Al electrode/GZO/P-type nc-Si:H/I layer InxGa1-xN intrinsic film/N-type nc-Si:H/GZO/Al back electrode/AIN insulating
layer/polyimide (PI) flexible substrate. The preparation method for the prent invention compris the steps of: firstly, preparing an AIN insulating layer and an Al back electrode by a magnetron sputtering method; then preparing a Ga-doped ZnO (GZO) transparent conductive film, an N-type hydrogenated nano-crystalline silicon (nc-Si:H) film, an InxGa1-xN quantum well intrinsic crystal film, a P-type nc-Si:H film and another GZO transparent conductive film in quence by an Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition (ECR-PEMOCVD) system; and finally preparing an Al metal electrode. The solar cell with a flexible substrate of an adjustable bandgap quantum well structure has excellent flexibility and light weight, is easy to carry, and has industrial potential and market space. Besides, the preparation process of the solar cell of the prent invention is simple, which enables the solar cell to be produced in large scale.小鲤鱼跃龙门
申请人：Shenyang Institute of Engineering
地址：18, Puchang Road Shenbei New District Shenyang Liaoning 110136 CN
国籍：CN
代理机构：Decamps, Alain René François
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