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专利名称：CORDIERITE CERAMIC, AND MEMBER FOR SEMICONDUCTOR MANUFACTURE DEVICES
WHICH COMPRISES SAME
发明人：IIDA, SHUICHI,FUKUI, AKEO,SUE, TOSHIYUKI 申请号：EP11836348索引的作用
申请日：20111026
公开号：EP2634156A4
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宝玉公开日：
往生营
20141029小雨点儿歌
专利内容由知识产权出版社提供
摘要：The prent invention provides a cordierite ceramic having a small coefficient of thermal expansion and an excellent mechanical strength, and a member for miconductor manufacture devices, which us the cordierite ceramic. The cordierite ceramic contains a main component having a composition including Mg in an amount of 12.6% by mass or more and 14.0% by mass or less in terms of an oxide, Al in an amount of 33.4% by mass or more and 34.4% by mass or less in terms of an oxide and Si in an amount of 52.0% by mass or more and 53.6% by mass or less in terms of an oxide, and an accessory component, wherein the accessory component contains any one of Y, Yb, Er, and Ce in an amount of 4.5% by mass or more and 15.0% by mass or less in terms of an oxide bad on 100% by mass of the main component, wherein cordierite, disilicate and spinel are prent as crystal phas. The cordierite ceramic has a coefficient of thermal expansion ranging from -120 ppb/°C to +120 ppb/°C, a four-point bending strength of 170 MPa or more, a low thermal expansion performance and an excellent mechanical strength.
申请人：KYOCERA CORPORATION
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