专利名称：Ceramic heater 发明人：杉本 博哉
申请号：JP2013145595申请日：20130711
公开号：JP6084906B2ps如何旋转图片
公开日：
20170222五红汤
模具设计与制造
黄鹤楼的作者是谁专利内容由知识产权出版社提供
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摘要：PROBLEM TO BE SOLVED: To enhance temperature uniformity in a ceramic heater including an inner peripheral side resistance heater and an outer peripheral side resistance heater.SOLUTION: First and cond conductive surfaces 30a, 30b are embedded independently in a plane P2 different from a plane P1, where an inner peripheral side resistance heater 20 and an outer peripheral side resistance heater 24 are formed, so as to overlap the inner peripheral side resistance heater 20. The plane P2 is located between the plane P1 and a wafer mounting surface 12a. One end 24a of the outer peripheral side resistance heater 24 is connected with an outer peripheral side power supply terminal 28a via a connection terminal 26a and the first conductive surface 30a, and the other end 24b of the outer peripheral side resistance heater 24 is connected with an outer peripheral side power supply terminal 28b via a connection terminal 26b and the cond conductive surface 30b.
申请人：日本碍子株式会社
地址：愛知県名古屋市瑞穂区須田町２番５６号
国籍：JP
代理人：特許業務法人アイテック国際特許事務所
女士马甲
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