专利名称:Apparatus and method for detection of
edge damages
发明人:Jun He,Jeff Hicks,Chris Litteken,Tom条纹t恤
Marieb,Alan Lucero,Jo Maiz,Jun He,Jeffrey
国际经济贸易Morisson Hicks
申请号:US11712355
申请日:20070228
公开号:US20080203388A1
公开日:
20080828
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专利附图:
摘要:Embodiments of the invention enable detection of edge damages in
miconductor devices. To this purpo, one or more continuity structures may be provided, where each structure compris an undulating arrangement dispod between active circuits of the miconductor device and a perimeter of the metallization layers. The continuity structure(s) forms one or more conductive paths intercting a plurality of metallization layers in the miconductor device. A relative change in an electrical characteristic of the continuity structure(s) is monitored to ascertain whether or not an edge damage is prent.
高兴的用英语怎么说申请人:Jun He,Jeff Hicks,Chris Litteken,Tom Marieb,Alan Lucero,Jo Maiz,Jun
电传He,Jeffrey Morisson Hicks
地址:Hillsboro OR US,Banks OR US,Portland OR US,Portland OR US,Chandler AZ US,Portland OR US,Portland OR US,Manning OR US
国籍:US,US,US,US,US,US,US,US
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