寒碜的意思专利名称：PURGE LOAD PORT
发明人：JUNG-HUA CHEN,CHEN-WEI KU,HONG-WEN
LIAO
申请号：US14945030苹果电脑开机密码忘记了怎么办
申请日：20151118
鲍晶晶公开号：US20170069516A1
公开日：
20170309
平安是国企吗
专利内容由知识产权出版社提供
专利附图：
明晃晃是什么意思
培训邀请函摘要：A purge load port which is a load port devid with a purging plate and a
松狮犬多少钱一只purging module. The purging plate has inlet nozzles, outlet nozzles and recognizer; and the purging module has an inlet opening, an outlet opening, at least a temperature and
humidity nsor, at least a flow meter and at least a pressure nsor. It makes the load port incapable of purging to provide the purging techniques after being devid with purging plate and purging modules, which solves the problem of controlling the cleanness by conventional load port, and thus effectively improves the yield of wafers in microchip fabrication.
申请人：CHEN-WEI KU
地址：BAOSHAN TOWNSHIP TW
国籍：TW琵琶行知识点
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