Tailoring channel strain profile by recesd mater

更新时间:2023-06-12 14:32:34 阅读: 评论:0

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专利名称:Tailoring channel strain profile by recesd
kate winsletmaterial composition control
发明人:Elisabeth Marley Koontz
申请号:US11021649雅思视频教程
申请日:20041222大学新生 电影
公开号:US07279406B2
公开日:
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专利内容由知识产权出版社提供
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摘要:The prent invention facilitates miconductor fabrication by providing
methods of fabrication that tailor applied strain profiles to channel regions of transistor devices. A strain profile is lected for the channel regions (). Recesd regions are
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formed () in active regions of a miconductor device after formation of gate structures according to the lected strain profile. A recess etch () is employed to remove a surface portion of the active regions thereby forming the recess regions. Subquently, a composition controlled recess structure is formed () within the recesd regions according to the lected strain profile. The recess structure is comprid of a strain inducing material, wherein one or more of its components are controlled and/or adjusted during formation () to tailor the applied vertical channel strain profile.唐顿庄园 第四季
申请人:Elisabeth Marley Koontz
地址:Dallas TX US
国籍:US
代理人:Peter K. McLarty,W. James Brady, III,Frederick J. Telecky, Jr.
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