专利名称：EQUI-BIAXIAL FLEXURE TEST DEVICE FOR THIN AND ULTRA-THIN SEMICONDUCTOR
WAFERS AND OTHER WAFERS
发明人：GURUSWAMY, Sivaraman,PEARCE, Cody, A.nobleman>melody什么意思
申请号：US2009066074
同文英语申请日：20091130
safari是什么公开号：WO10/082977P1
公开日：幼儿早教方法
重荷
20100722
专利内容由知识产权出版社提供倒廪倾囷
摘要：A test device for applying a biaxial load on a test specimen includes a housing having an internal chamber and a support positioned in the internal chamber upon which the test specimen is positioned. The test specimen is engageable with the support to divide the internal chamber into a first chamber portion and a cond chamber portion. The test device also includes an inlet through which a pressurized fluid is transferred to the first chamber portion to apply the biaxial load upon the test specimen, a pressure nsor operable to detect the pressure of the pressurized fluid in the first chamber portion, and a displacement nsor operable to detect movement of the test specimen in respon to the biaxial load applied by the pressurized fluid. The test device enables determination of biaxial flexural strength and load deflection information for thin/ultra thin wafers of miconductors and other brittle materials.
neoline申请人：GURUSWAMY, Sivaraman,PEARCE, Cody, A.
subtotal
地址：US,US,US
国籍：US,US,US
代理机构：EVANS, Edward, J.更多信息请下载全文后查看
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