Microfabrication of pattern imprinting

更新时间:2023-06-03 22:19:04 阅读: 评论:0

初二历史复习提纲专利名称:Microfabrication of pattern imprinting
大学英语四级词汇
发明人:Masahiro Hatakeyama,Katsunori Ichiki,Tohru
经典英语故事Satake,Yotaro Hatamura,Masayuki Nakaoblake lively
aol申请号:US09301311lycos
眼线笔颜色申请日:19990429
公开号:US06671034B1memorystick
初中英语作文写作技巧公开日:
新东方考研网
20031230
专利内容由知识产权出版社提供
专利附图:
摘要:The object of the prent invention IS to provide an optical imprinting
apparatus and method for producing a two-dimensional pattern, having line widths less than the wavelength of an exposure light. The evarnescent (proximity) field effect is
adopted to realize the apparatus and method. An optical imprinting apparatus compris: a container in which light is enclod therein; an exposure-mask having a proximity field exposure pattern firmly fixed to a ction of said container for exposing said exposure pattern on a photo-nsitive material through an evanescent field by said light enclod therein; and a light source for supplying said light in said container.
申请人:EBARA CORPORATION,HATAMURA YOTARO
代理机构:Wenderoth, Lind & Ponack, L.L.P.
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