摘要
硫化氢（分子式：H2S）是油气田开采过程中常见的副产物之一，不仅具有强烈腐蚀性，而且毒性极强，对人员、工业设备和环境都存在巨大的危害性。因此国内外对硫化氢气体检测技术开展了大量研究，其中光学式硫化氢气体传感器因为其无源、耐腐蚀、抗电磁干扰等优点，特别适用于易燃易爆等环境恶劣场合下进行长距离在线监测，目前光学式硫化氢气体传感器主要有光谱吸收型、倏逝波型、荧光型等，但存在体积庞大、灵敏度低等缺点。
本文针对高灵敏度、微型化硫化氢气体传感器技术，创新地将硫化氢敏有机聚合物与光波导技术相结合，提出了一种干涉型有机聚合物光波导硫化氢气体传感方法，开展了有机聚合物材料特性分析、波导结构设计与制作工艺、传感特性仿真与测试等理论和实验研究，研究结果表明该方法具有体积小、响应快、灵敏度高、易集成等特点。
本文主要工作内容包括：
1、采用光波导有效折射率法以及变分有效折射率法理论，结合硫化氢敏有机聚合物光学特性，建立了硫化氢敏有机聚合物光波导设计与分析模型，对波导结构与光学传输特性等进行仿真分析，获得单模传输脊型波导结构参数，为有机聚合物脊型光波导制作奠定了基础。
敌人的英文2、提出一种光纤F-P腔结构的干涉型有机聚合物硫化氢气体传感器。在F-P 腔中填充硫化氢敏有机聚合物材料，利用硫化氢浓度变化所引起的折射率变化实现其高精度干涉测量。开展了光纤F-P腔结构硫化氢气体传感器理论模型、光路结构设计、信号处理算法以及实验测试等研究，一方面验证了其实现高灵敏度硫化氢传感的可行性。另一方面通过实验，获得硫化氢敏有机聚合物材料折射率变化与硫化氢浓度间的关系，为M-Z结构干涉型有机聚合物光波导硫化氢传感器的研究奠定了基础。
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3、设计了M-Z结构干涉型有机聚合物光波导硫化氢传感器，完成了Y分支波导结构设计，M-Z波导干涉仪结构设计等研究，并进行了M-Z结构的有机聚合物波导传感器特性仿真，结合有机聚合物材料折射率与气体浓度关系，通过模拟仿真，验证了M-Z结构干涉型有机聚合物波导传感器实现硫化氢气体高灵敏度传感的可行性。
4、开展了M-Z结构干涉型有机聚合物波导传感器脊型光波导制作工艺研究。在总结常规光波导制作工艺的基础上，设计了有机聚合物脊型光波导制作流程。
利用反应离子刻蚀技术完成了有机聚合物脊型光波导的制作，测试结果表明制作的有机聚合物光波导满足设计尺寸的误差要求，为进一步制作有机聚合物M-Z干涉仪波导光路奠定了基础。
关键词：有机聚合物、硫化氢气体传感、脊型光波导district是什么意思
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ABSTRACT
Hydrogen sulfide (molecular formula: H2S) is one of the common by-products in the cour of exploration and exploitation of oil and gas industry, which is strong toxic and corrosive. It is harmful to personnel, industrial equipment and environment. Therefore, the detection techniques of H2S gas have attracted a large amount of rearch all over the world. Among all kinds of gas nsors, the optical H2S gas nsor due to its passive, corrosion resistance, resistance to electromagnetic interference and other characteristics, is particularly applicable for long-distance online monitoring in specific occasion with the conditions of flammable long-distance, etc. Nowadays, the optical H2S gas nsor mainly includes spectrum absorption type, evanescent field type, fluorescent type, etc. Some of them have the disadvantages of large volume, low nsitivity, etc.
This thesis focus on high nsitivity and miniaturization H2S gas nsor technology.
A nsing method of H2S gas detection bad on an organic polymer optical waveguide is prented in this thesis, which u the H2S nsitive organic polymer and the optical waveguide technique. Theoretical and experimental rearch of organic polymer optical waveguide gas nsor has carried out in this thesis. The results show that this method has the advantages of small volume, fast respon, high nsitivity, easy integration, etc.
The main work of this thesis includes:pbx
Firstly, according to the theory of optical waveguide effective index method and the effective refractive index of variational method, together with H2S nsitive organic polymer optical properties, the model for designing and analyzing H2S nsitive organic polymer optical waveguide is established. Optical transmission characteristics of waveguide structure is simulated. The single mode transmission structure ridge waveguide parameters has been confirmed, which laid a foundation for high nsitive organic polymeric ridge type optical waveguide H2S gas nsor.bomberman
Secondly, a kind of optical fiber F - P cavity structure of interferometric organic polymer hydrogen sulfide gas nsor is described. The F - P cavity is filled with H2S nsitive organic polymer materials, according to the refractive index changes caud by concentration of H2S gas changes to realize the high-precision interferometry. The theory model of optical fiber F - P cavity structure of H2S gas nsor, the design of the
structure of the optical path, signal processing algorithms and experiments has been studied. On one hand, the feasibility of implementation high nsitivity H2S gas nsing is verified, on the other hand, with the experiment method, the relationship between the refractive index of the organic polymer and the gas concentration is obtained, which laid a solid foundation of M-Z structure interferometric gas nsor.
Thirdly, the organic polymer optical waveguide H2S gas nsors bad on M-Z structure interferometer is designed. The structure of Y branch waveguide and M-Z structure waveguide interferometer is studied. The characteristic of M-Z structure organic polymer waveguide nsor is simulated. Through the simulation, according to the relationship between the gas concentration and the refractive index organic polymer material, the feasibility of realizing the gas concentration nsing by the M-Z structure organic polymer ridge waveguide is verified.
Finally, the production process of M-Z structure organic polymer ridge optical waveguide is rearched. On the basis of summarizing the conventional optical waveguide manufacture technology, the production process of organic polymer ridge optical waveguide is designed. Production of organic polymer ridge optical waveguide is completed by using photo etching technology. The results show that the production of organic polymer optical waveguide can satisfy the requirements of design size error, which has laid a solid foundation for further production of organic polymer M-Z structured optical waveguide.
Keywords: Organic polymer, hydrogen sulfide gas nsor, ridge waveguide
目录
目录
第一章绪论 (1)
1.1 研究背景和意义 (1)
1.2 光学硫化氢气体传感器的研究现状 (3)
1.2.1 光谱吸收型硫化氢气体传感器 (3)
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1.2.2 倏逝波型硫化氢气体传感器 (4)
1.2.3 荧光型硫化氢气体传感器 (6)
1.2.4 折射率改变型硫化氢气体传感器 (7)
1.3 本文的主要工作 (8)
1.4 本章小结 (9)
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第二章硫化氢敏有机聚合物脊波导设计与分析 (10)
2.1 光波导材料 (10)
韩版求婚大作战2.1.1 半导体光波导材料 (10)
2.1.2 有机聚合物光波导材料 (11)
2.2 光波导分析基础 (12)
2.2.1 平板光波导分析方法 (12)
2.2.2 脊型光波导分析方法 (17)
2.3 有机合物脊型波导的设计 (20)
2.4 有机聚合物脊型波导的仿真 (22)百度英文词典
2.5 本章小结 (27)
第三章 F-P腔干涉型硫化氢气体传感器研究 (28)
3.1 聚乙烯亚胺和硫化氢气体反应原理 (28)
3.2 基于光纤F-P腔的有机聚合物折射率变化实验原理及系统搭建 (29)
3.3 实验过程及结果分析 (34)
3.4 本章小结 (38)
