专利名称：Vertical furnace
发明人：Huusn,Frank,Berenpas, Gerard,Hasper,
Albert,De Ridder, Chris G.M.拆散的意思
申请号：EP96200869.4
nobile
申请日：19960329
公开号：EP0735575A1
nickname是什么意思公开日：
rodney king>等等 英文
ppt是什么意思19961002
专利内容由知识产权出版社提供
专利附图：projects
摘要：Vertical furnace for processing wafers positioned on a support structure. The furnace compris an inner sleeve, heating means and an outer sleeve. To support the inner sleeve on the support structure a support sleeve is provided engaging with its top
end lower part of the inner sleeve and resting with its lower end on the support structure.
申请人：ASM INTERNATIONAL N.V.
地址：P.O. Box 100 3720 AC Bilthoven NL
国籍：NL
天津街舞head teacher代理机构：de Bruijn, Leendert C.
祝贺 英文
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