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专利名称：Multicharged particle beam drawing
flyer
apparatus and multi charged particle beam
辩论会技巧
drawing method
发明人：松本 裕信
申请号：JP2019142543
申请日：20190801
pnda公开号：JP6754481B2
公开日：
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ui是什么
韩语在线翻译中文20200909
专利内容由知识产权出版社提供
摘要：PURPOSE: To provide a device capable of correcting distortion of the reflection surface of a mirror, and/or positional deviation caud by distortion, or the like, on the sample surface of drawing object, in multi-beam drawing.CONSTITUTION: A drawing device 100 includes a pixel division unit 50 for dividing the drawing region of a sample into a plurality of mesh-like pixel regions irradiated with a multi-charged particle beam, a pixel block generation unit 52 for grouping the plurality of pixel regions into a plurality of pixel blocks constituted by at least one pixel region, a correction unit 64 for correcting the positional deviation in units of pixel blocks, for each pixel block of the plurality of pixel blocks, an irradiation amount calculation unit 68 calculating the irradiation amount for each pixel subjected to correction of positional deviation, and a drawing unit 150 for patterning the sample by using the multi-charged particle beam, so that each pixel is irradiated with the calculated irradiation amount.SELECTED DRAWING: Figure 1申请人：株式会社ニューフレアテクノロジーemily bear
地址：神奈川県横浜市磯子区新杉田町８番１
碧昂丝好听的歌
国籍：JP
代理人：池上 徹真，須藤 章，高下 雅弘更多信息请下载全文后查看觇标
