THIN FILM TRANSISTOR ASSEMBLY, PARTICULARLY SUITAB

更新时间:2023-05-20 03:58:32 阅读: 评论:0

copyright是什么意思专利名称:THIN FILM TRANSISTOR ASSEMBLY,
PARTICULARLY SUITABLE FOR LIQUID
黄瓜英文CRYSTAL DISPLAY DEVICE, AND PROCESS
FOR FABRICATING THE SAME
广州瑜伽导师培训发明人:JOO-YOUNG KIM,WOONG-KWON
KIM,YOUNG-JIN OHleavealone
申请号:US09247368
秋季护肤申请日:19990210
eumendies公开号:US20020110960A1
公开日:
抑制的意思20020815
专利内容由知识产权出版社提供
摘要:A method of fabricating a thin film transistor (TFT) asmbly having a plurality of array lines, a plurality of pads, a plurality of link lines connecting the pads to the array lines, an insulating layer, and an electrode pattern formed on a substrate, and further having short-preventing structures for preventing electrical shorts between the pads and the link lines. The method includes the steps of forming the plurality of pads on the substrate, depositing the insulating layer on the substrate including over the pads, etching the insulating layer to form contact holes, and etching the insulating layer between the adjacent pads to expo a surface of the substrate to prevent a short between the
adjacent pads from occurring, and forming the electrode pattern on the insulating layer by depositing and patterning an electrode layer such that the electrode pattern contacts the pads through the contact holes formed in the insulating layer. The steps of etching the insulating layer between the adjacent pads is performed concurrently with the etching step for forming the contact holes. In addition, the areas
between adjacent pads are further etched concurrently with the step of etching the electrode layer.
申请人:KIM JOO-YOUNG,KIM WOONG-KWON,OH YOUNG-JIN
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