MPX5500Rev 7, 09/2009
Freescale Semiconductor
adopted© Freescale Semiconductor, Inc., 2005-2009. All rights rerved.
Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MPX5500 ries piezoresistive transducer is a state-of-the-art
monolithic silicon pressure nsor designed for a wide range of applications, but particularly tho employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced
micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.
Features
• 2.5% Maximum Error over 0° to 85°C
dorm•Ideally suited for Microprocessor or Microcontroller-Bad Systems •Patented Silicon Shear Stress Strain Gauge •Durable Epoxy Unibody Element
•
Available in Differential and Gauge Configurations
ORDERING INFORMATION
Device Name史蒂夫 欧文
Ca No.
# of Ports Pressure Type Device
Marking
None
Single
easy ui
Dual
Gauge
Differential Absolute
Unibody Package (MPX5500 Series)MPX5500D 867•
•MPX5500D MPX5500DP
867C
•
•
MPX5500DP
MPX5500Series
0 to 500 kPa (0 to 72.5 psi)
0.2 to 4.7 V Output
MPX5500D CASE 867-08
MPX5500DP CASE 867C-05
UNIBODY PACKAGES
MPX5500
Sensors
Operating Characteristics
Table 1. Operating Characteristics (V S = 5.0 Vdc, T A = 25°C unless otherwi noted, P1 > P2. Decoupling circuit shown in Figure 4. required to meet electrical specifications.)
Characteristic
Symbol Min Typ Max Unit Pressure Range (1)1. 1.0 kPa (kiloPascal) equals 0.145 psi.
P OP 0—500kPa Supply Voltage (2)2.Device is ratiometric within this specified excitation range.
V S 4.75 5.0 5.25Vdc Supply Current I O —7.010mAdc Zero Pressure Offt (3)(0 to 85°C)3.Offt (V off ) is defined as the output voltage at the minimum rated pressure.
V off 0.0880.200.313Vdc Full Scale Output (4)(0 to 85°C)4.Full Scale Output (V FSO ) is defined as the output voltage at the maximum or full rated pressure.
V FSO 4.587 4.70 4.813Vdc Full Scale Span (5)(0 to 85°C)5.Full Scale Span (V FSS ) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure.V FSS — 4.50—Vdc Accuracy (6)(0 to 85°C)
6.Accuracy (error budget) consists of the following:
Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis:Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C.
TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
TcOfft:Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.Variation from Nominal:The variation from nominal values, for Offt or Full Scale Span, as a percent of V FSS , at 25°C.
———±2.5%V FSS Sensitivity V/P —9.0—mV/kPa Respon Time (7)
orbiting
7.Respon Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure.t R — 1.0—ms Output Source Current at Full Scale Output I O+—0.1—mAdc Warm-Up Time (8)
8.Warm-up Time is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.
颜色英语
—
—
20
—
ms
MPX5500
Sensors
project management
Maximum Ratings
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure nsor chip.
Figure 1. Fully Integrated Pressure Sensor Schematic
Table 2. Maximum Ratings (1)
1.Maximum Ratings apply to Ca 867 only. Extended exposure at the specified limits may cau permanent damage or degradation to the device.Rating
Symbol Value Unit Maximum Pressure (2) (P2 ≤ 1 Atmosphere)2.This nsor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa.
P1max 2000kPa Storage Temperature T stg -40 to +125°C Operating Temperature
T A
-40 to +125
°C
Sensing Element
Thin Film Temperature Compensation
and Gain Stage #1Gain Stage #2
and Ground Reference Shift Circuitry
V S V out
GND
Pins 4, 5, and 6 are NO CONNECTS for Unibody Package.
1
3
2
MPX5500Sensors
On-chip Temperature Compensation and Calibration
尾毛Figure 3 illustrates the Differential/Gauge basic chip carrier (Ca 867). A fluorosilicone gel isolates the die
surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the nsor
diaphragm. (For u of the MPX5500D in a high pressure, cyclic application, consult the factory.)
The MPX5500 ries pressure nsor operating
characteristics, and internal reliability and qualification tests are bad on u of dry air as the pressure media. Media, other than dry air, may have adver effects on nsor
performance and long-term reliability. Contact the factory for information regarding media compatibility in your application.
Figure 2 shows the nsor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0° to 85°C using the decoupling circuit shown in Figure 4. The output will saturate outside of the specified pressure range.
Figure 4 shows the recommended decoupling circuit for interfacing the output of the integrated nsor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended.
Figure 2. Output vs. Pressure Differential
Figure 3. Cross-Sectional Diagrams (not to scale)
Figure 4. Recommended Power Supply Decoupling and Output Filtering (For additional output filtering, plea refer to Application Note AN1646)
Differential Pressure (kPa)
O u t p u t (V )
TYPICAL
MIN
5.04.54.03.53.02.52.01.51.00.500
50
100150200250300350400
450
550
500
MAX
Transfer Function:
V out = V S *(0.0018*P+0.04) ± Error V S = 5.0 Vdc
Temperature = 0 to 85°C
Fluoro Silicone Die Coat
Wire Bond
Die
P1
Stainless Steel Metal Cover
Lead Frame
RTV Die Bond
Epoxy Ca
P2
+5 V
对外汉语就业
1.0 μF
0.01 μF
470 pF
GND
V s
V out
IPS
Output
MPX5500
Sensors
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Freescale designates the two sides of the pressure nsor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel which protects the die from harsh media. The Freescale MPX pressure nsor is designed to operate with positive differential pressure applied, P1 > P2.
The Pressure (P1) side may be identified by using the following table.
Part Number Ca Type
Pressure (P1)Side Identifier
有道日语在线翻译
MPX5500D 867Stainless Steel Cap MPX5500DP
867C
Side with Part Marking
