New products require clean room compatible vacuum web coaters. New products are constantly being developed in laboratories, which put increasing demands on mass production roll coaters. SMARTWEB is designed to eliminate the costly transition from development to production and to allow faster turnover to higher volumes.
Applied SMARTWEB
applications
SMARTWEB offers the highest
flexibility for multiprocess web coaters. It incorporates sputter sources,
evaporation sources for metals and for polymers as well as PECVD equipment. SMARTWEB’s desig
n enables any combination of the technologies in a single coating operation and with its small footprint, it fits into standard clean rooms.
New products include:
Flexible Printed Circuit Boards (FPCB): Higher adhesion
strength of copper coatings is being demanded due to increasing line density and decreasing width. SMARTWEB enables the u of a range of improved pre-treatment tools for supporting adhesion promotion process.
Transparent ITO top-electrodes for displays as well as the
small geometrical structures of FPCBs need a dust and particle free deposition environment in the process chamber. No moving parts or particle generating operations are allowed above the coating drum. The complete coater must also be small enough to fit into stan制作课程表
dard size clean rochatting
oms.
Flexible displays using Organic Light Emitting Devices (OLEDs)
require metal evaporator sources for the cathode layer and low temperature evaporators for the organic polymers.
Super barrier layers for in-line encapsulation of moisture
nsitive OLED layers are needed.
Flexible solar cells have been developed with different
photovoltaic materials, using various deposition technologies such as poly crystalline or amorphous Silicon, Copper-Indium-Gallium Selenide. All require transparent conductive top electrodes with low specific resistivity and high optical transparency.
Flexible printed circuit board on ink cartridge.
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FEATURES
Pre- and Post-Treatment Tools
Magnetically Enhanced Glow-Discharge
TREATMAG ™ is the state of the art magnetron glow discharge device. It cleans the substrate surface from adherent water molecules. It is ud successfully in Applied Materials’ metallizers, electron beam and sputter web coaters. TREATMAG ™ produces ion energies up to 70 eV.
Linear Ion Sources
As an alternative to TRE熊英文怎么读
ATMAG,™ linear ion sources from different suppliers can be installed in the SMARTWEB process chamber. The provide higher ion energies above 70 eV.
RF Hollow Anode
For even higher ion energies up to 2000 eV, an RF-powered hollow anode is available. With an asy
mmetric RF-discharge, the substrate is biad negatively. Depending on the gas ud, this results in an Argon-ion bombardment of the web (sputter cleaning) or in an ion-assisted ba coating.
Deposition Tools
Planar Magnetron
The newly developed Applied Materials’ planar magnetron for the SMARTWEB us clamped rectangular target plates. No water circuit is opened during target exchange. Optimized magnetic field arrangement achieves a target utilization of > 40%.
Rotatable Magnetron
For target utilization above 80%, Applied Materials has
developed a rotatable magnetron. With the cylindrical target
rotating around a stationary t of permanent magne向日葵种子
ts, a uniform erosion of the target tube results in a high utilization and thus a long lifetime of the target.
Evaporator for Metals
For evapor文具盒英语
ation of metals such as silver and magnesium, which are ud as metal cathode layers in OLED displays, a linear
evaporator is ud with optimized lateral uniformity. Independent temperature contr关于地震
ol of crucible and
nozzle plate allows for
optimum therm考研英语单词
al conditions for different types of metals.
Applied Materials’ planar magnetron with high target utilization
Clamped planar target, new (right) and ud (left)
Planar (left) and rotatable (right) magnetrons available
SMARTWEB—The production and development tool with multiprocess capability. With its innovative modular design, SMARTWEB offers a wide variety of
pre- and post-treatment process, deposition process and in-line layer quality measurement methods.
Machine control with PC and
monitor Layer measurement with
OPTOPLEX (optional)
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