抛弃英文专利名称：WAFER ALIGNER海口翻译
发明人：Anthony C. BONORA,Justo GRACIANO
选举人票是什么意思申请号：US14928352
申请日：20151030
公开号：US20160126128A1
公开日：
再线翻译
小学暑假班英语20160505
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专利附图：
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摘要：A miconductor wafer transport apparatus includes a frame, a transport arm movably mounted to the frame and having at least one end effector movably mounted to the arm so the at least one end effector travers, with the arm as a unit, in a first direction relative to the frame, and travers linearly, relative to the transport arm, in a
waltzcond direction, and an edge detection nsor mounted to the transport arm so the edge detection nsor moves with the transport arm as a unit relative to the frame, the edge detection nsor being a common nsor effecting edge detection of each wafer simultaneously supported by the end effector, wherein the edge detection nsor is configured so the edge detection of each wafer is effected by and coincident with the traver in the cond direction of each end effector on the transport arm.
申请人：Brooks Automation, Inc.
地址：Chelmsford MA US
国籍：US
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