特气扩充及毒气Detector侦测器扩充验收标准
一.气体管路要求及验收标准
1.气体管路测试标准
气体种类耐压测试饱压测试Helium
leak
Particle moisture Oxygen
GN2keep the
pressure≥
2hr,and the
pressure is
9kg/cm2
robert knepperkeep the
pressure≥
24hr,and
the
pressure is
8kg/cm2
--------
≤
50pc/cft
at 0.1µm
----------------
SiH4keep the
pressure≥
2hr,and the
porinpressure is
9kg/cm2
keep the
pressure≥
24hr,and
the
pressure is
8kg/cm2
≤ 2×10-
9atm cc/c
≤
20pc/cft
斯卡波罗集市歌词at 0.1µm
≤10
Inlet+10ppb
≤10
Inlet+10ppb
0.5%PH3H2keep the
pressure≥
2hr,and the
pressure is
9kg/cm2
keep the
pressure≥
圣诞的英语24hr,and
the
pressure is
8kg/cm2
≤ 2×10-
9atm cc/c
≤
茶杯的英文20pc/cft
at 0.1µm
≤10
Inlet+10ppb
≤10
Inlet+10ppb
NF3keep the
pressure≥
2hr,and the
pressure is
9kg/cm2
keep the
pressure≥
malibu
24hr,and
the
pressure is
8kg/cm2
≤ 2×10-
9atm cc/c
≤
20pc/cft
at 0.1µm
≤10
Inlet+10ppb
≤10
Inlet+10ppb
0.5%TMBH2keep the
pressure≥
2hr,and the
pressure is
9kg/cm2
keep the
pressure≥
24hr,and
the
pressure is
8kg/cm2
≤ 2×10-
9atm cc/c
≤
20pc/cft
at 0.1µm
≤10
Inlet+10ppb
≤10
Inlet+10ppb
2.气体管路验收标准
1.检查各系统管线之路径是否正确。
2.检查各系统管线数量、规格及管径大小是否正确。
3.检查各系统管线是否配置整齐及确实依规定固定。
4.检查各系统管线之标示是否详尽及正确，管线材质是否正确。
5.检查各系统管线之垫片材质是否使用正确，固定是否良好。
6.检查各系统管线之尺寸、高度、路径是否符合设计规格。
7.检查各系统管线之管支撑之间距是否符合规定。
8目视检查各系统管线是否水平或垂直无歪斜。
9竣工数据须包含现场各系统供应之会签纪录及测试记录窗体。
10竣工资料须包含每一气柜之配管示意图。
11竣工数据须包含工程相片。
13竣工资料须包含承包商自主检查表。
14所有竣工图面及竣工数据皆须有电子磁盘档案﹙Auto CAD 2004﹚
15 检查新增设备功能是否完全按照业主方进行设定，设备位置是否按图纸规划
二气柜要求及测试标准
1.功能要求
Name Qty Cyl Purge Pigtail
Cylinder
connector Auto Guard
0.5%PH3H2
GC
32+1Auto CGA√NF3 BSGS14Y Auto√Diss√SiH4 BSGS14Y Auto√Diss√0.5%TMBH2
GC
32+1Auto CGA√
Name
Auto
switch Sprinker
Touch
Screen
Controller Exh.nsor
Process
Filter
0.5%PH3H2
GC √√√PLC√
Pre40µm
Post0.003
µm
NF3 BSGS√√√PLC√Pre40µm Post0.003 µm
0.5%TMBH2
GC √√√PLC√
Pre40µm
Post0.003
µm
SiH4 BSGS √√PLC√Pre40µm Post0.003 µm
Name Panel
piping
size
Local
Scubber
Test port UV/IR
Excess
Flow Switch
dyingFlow
Meter
Display
on
Screen
0.5%PH3H2
GC
√√√√√NF3 BSGS √√ √SiH4 BSGS √√ √0.5%TMBH2
GC
√√√√√
Name
Heat
block Panel
heater
Cylinder
heater
Purifiers Pipe Type
Vacuum
Gauge
0.5%PH3H2
GC
√ √dual√NF3 BSGS√√ √ SiH4 BSGS√√ √ 0.5%TMBH2
GC
√ √dual√
2.盘面阀件要求
阀件名称解释1%PH3H2NF3SiH4 AS Autoswitch△△△CFG Conical filter gasket△△△EFS Excess flow switch△△△HPA High pressure access△△△HPI High pressure isolation△△△HPV High pressure vent△△LPI Low pressure isolation△△△LPV Low pressure vent△△△MLPV Manul LPV△△△PRV I Regulator Stage I△△△PRV II Regulator Stage II △△PGBV Purge gas bleed valve△△△PLI Process line isolation△△△
google英语在线翻译
SP Simple Port △ VGM Vacuum generator module△△△ESO Emergency shutoff Vavle △ PTPV Pigtail Purge vavle △ VBV Vent Bleed Vavle △
HP PT 1High pressure PT 1△△△
HP PT 2High pressure PT 1 △△
LP PT Low Pressure PT 1△△△
V PT Vent PT1△△△
3.盘面管径要求
NF3 BSGS
Heater Inlet A: 1/2” Female VCR-Type Heater Inlet B: 1/2” Female VCR-Type Process Outlet:1/2” Female VCR-Type Vac Gen Vent: 1/4”Male VCR-Type Vac Gen N2 Inlet: 1/4”Male VCR-Type N2 Purge Inlet: 1/4”Male VCR-Type HPA Inlet: 1/4”Male VCR-Type System Exhaust: 150-100-400 flange Labels: Verfied
in the waySiH4 BSGS
Heater Inlet A: 1/2” Female VCR-Type Heater Inlet B: 1/2” Female VCR-Type Process Outlet: 1/2”Female VCR-Type Vac Gen Vent: 1/4”Male VCR-Type Vac Gen N2 Inlet: 1/4”Male VCR-Type N2 Purge Inlet: 1/4”Male VCR-Type HPA Inlet: 1/4”Male VCR-Type System Exhaust: 150-100-400 flange Labels: Verfied
0.5%PH3H2 GC
Process Outlet: 1/4Female VCR-Type Vac Gen Vent: 1/4”Male VCR-Type Vac Gen N2 Inlet: 1/4”Male VCR-Type N2 Purge Inlet: 1/4”Male VCR-Type HPA Inlet: 1/4”Male VCR-Type System Exhaust: 150-100-400 flange Labels: Verfied
0.5%TMBH2 GC
Process Outlet: 1/4Female VCR-Type Vac Gen Vent: 1/4”Male VCR-Type Vac Gen N2 Inlet: 1/4”Male VCR-Type N2 Purge Inlet: 1/4”Male VCR-Type HPA Inlet: 1/4”Male VCR-Type System Exhaust: 150-100-400 flange Labels: Verfied
the new normal4.气柜测试要求(厂商提供出厂报告) Particle Test: < 1particles/ft3 0.1µm
