专利名称:DIE BONDER
生于忧患翻译发明人:OTSUKA MASAHIKO,TANAKA MASAYUKI 申请号:JP31679090
申请日:19901121
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公开号:JPH04186850A
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公开日:
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jamelia摘要:PURPOSE:To put a die bonder excellent in miconductor adhesion and suitable for mass production process to practical u, by providing each of the specified cover, blow plate, and heater block. CONSTITUTION:The following are provided; a cover 1 provided with an inrtion inlet 7 for wax collet and an inrtion inlet 8 for chip collet, a blow plate 2 which is arranged under the cover 1, retains a carried lead frame 3, and is provided with a plurality of gas nozzles 12 which are arranged in a rectangle type so as to surround a first and a cond heater block engaging holes 9, 10 arranged in the facing positions of the above-mentioned inrtion inlets 7, 8, and spout mixed gas of hydrogen and nitrogen, and a first heater block 5 and a cond heater block 6 which contain a plurality of bar heaters 13, move up and down the engaging holes 9, 10 opened in the blow plate 2, come into contact with the lead frame 13 and heat it. Further, for example, a quenching circuit which interrupts the supply of hydrogen gas by a signal from a fire detector is added.
申请人:FUJITSU LTD,FUJITSUU YAMANASHI EREKUTORONIKUSU:KK
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