专利名称：PHYSICAL VAPOR DEPOSITION CHAMBER
WITH ROTATING MAGNET ASSEMBLY AND
attendCENTRALLY FED RF POWER
发明人：ALAN RITCHIE,KEITH MILLER
african申请号：US13075841
申请日：20110330
panadol
公开号：US20110240466A1
点读笔ox公开日：
20111006jophine
专利内容由知识产权出版社提供
专利附图：
摘要：Embodiments of the prent invention provide improved methods and
apparatus for physical vapor deposition (PVD) processing of substrates. In some
embodiments, an apparatus for physical vapor deposition (PVD) may include a target asmbly having a target comprising a source material to be deposited on a substrate, an opposing source distribution plate dispod opposite a backside of the target and electrically coupled to the target along a peripheral edge of the target, and a cavity dispod between the backside of the target and the source distribution plate; an electrode coupled to the source distribution plate at a point coincident with a central axis of the target; and a magnetron asmbly comprising a rotatable magnet dispod within the cavity and having an axis of rotation that is aligned with a central axis of the target asmbly, wherein the magnetron asmbly is not driven through the electrode.tiger是什么意思
少儿学习申请人：ALAN RITCHIE,KEITH MILLER
地址：Menlo Park CA US,Mountain View CA US
国籍：US,US
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