专利名称：PLASMA ACTIVATION SYSTEMS
英文搜索引擎发明人：FRANKLIN, Mark, A.,FRANKLIN, William, J.申请号：US2012/070997
家人的英文申请日：20121220
emc是什么意思公开号：WO2013/101670A1
公开日：
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20130704
障碍英语专利内容由知识产权出版社提供
专利附图：
摘要：Improved systems relating to modifying the surface properties of at least one material using plasma-bad process. Application of methods and apparatus of the system are particularly uful in miconductor processing.
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申请人：FRANKLIN, Mark, A.,FRANKLIN, William, J.经典英文个性签名
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地址：7767 E. Starla Drive Scottsdale, AZ 85255 US,10 W. Minnezona Avenue, Apt. 102 Phoenix, AZ 85013 US合肥贝乐学科英语
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国籍：US,US
代理人：STONEMAN, Martin, L.
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