metrology

期刊名称：SynchrotronRadiationNews

作者：Sawhney,Kawal,Wang,Hongchang,Sutter,John,Alcock,Simon,Berujon,

Sebastien

年份：2013年

期号：第5期

关键词：Practical/lightcoherence;lightsources;opticaldistortion;synchrotron

radiation;wavefrontnsors;X-rayapparatus;X-raydiffraction;X-rayoptics/X-

rayoptics;diamondlightsource;3Gsynchrotronradiationsources;X-ray

beamlines;metrologylabs;visiblelight-badmeasuringinstruments;in-situ

wavefrontnsing;upstreambeamlineopticdistortion;activeoptics;diffraction

limitedbeam;coherenceprervedbeam/A0785X-ray,gamma-rayinstruments

andtechniquesA0670DSensinganddetectingdevicesA4225KOptical

coherenceB7450X-rayandgamma-rayequipmentB7230Sensingdevicesand

transducers

摘要：Modernthird-generationsynchrotronradiationsourcesprovidecoherent

andextremelybrightX-raybeams,buttheperformanceoftheopticmployedon

thebeamlinesiscriticalfortheX-rays'lityofthe

beamdeliveredtothesampleislimitedbytheoptics'imperfectionsand

theopticsareaccuratelyevaluatedinmetrologylabs

equippedwithvisible-light-badmeasuringinstruments,suchex-situ

characterizationsdonotallowperfectpredictionsoftheirbeamlineperformance,

sincethemechanicalandthermalstrainsimpodbybeamlineoperationcannotbe

-situat-wavelengthcharacterizationisthenaturalwayto

At-wavelengthmetrologyofx-rayopticsat

DiamondLightSource

overcomethislimitation[1].In-situwavefrontnsingperformedattheoptics'

operatingwavelength(at-wavelengthmetrology)canbeudnotonly...

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