apply to

Howtoapply

申请(专利)号：

KR

申请日：

1998-10-30

专利号：

KR100578612B1

公开公告日：

2006-11-30

主分类号：

G02F1/136

分类号：

G02F1/136;

G02F1/13

申请权利人：发明设计人：다카모리히데유키;

사카이미쓰히로;

노무라마사후미

公开国代码：

KR

申请国代码：

KR

优先权国家：

JP

优先权：

19971031JP97-

314632;

19971118JP332290

摘要：摘要附图：

Acoatingprocesscompristhestepsof

(a)holdingasubstrateusingaspinchuck

surroundedbyinnerandoutercups,such

thatthesubstratecanrotate,(b)rotating

thesubstratebyrotatingthespinchuck,

andapplyingacoatingliquidontothe

substrate,therebyformingacoatingon

thesubstrate,(c)discharging,fromthe

innerandoutercups,thatpartofthe

coatingliquidwhichisscatteredfromthe

substratewhilethesubstrateisrotated,

(d)exhaustingtheinnerandoutercups

throughapluralityofexhaustports

formedinouterperipheralportionsofthe

outercup,and(e)reducing,froma

peripheralregionofthesubstrate,the

mistofthecoatingliquidwhichhas

occurredduringthestep(b),beforethe

substratestopsrotation.

主权项：

상부개구및배기구를구비한컵부의안쪽에서기판에도포막을형성하는

도포방법은,/n(a)상기상부개구를통해컵부내에기판을반입하여,스핀척에의해

기판을유지하는공정과,/n

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